Oxygen effect on structural and optical properties of zinc oxide
No Thumbnail Available
Date
2018-09-05
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
This article deals with an investigation of the effect of oxygen content on optical and structural
properties of ZnO films. Zinc oxide films were deposited with the DC reactive magnetron
sputtering process on Si(100) and glass substrates. ZnO films were elaborated at different
oxygen flow rates from (O2) 12 to 35 sccm. The evolution of optical and structural properties
as a function of O2 was investigated by X-ray diffraction, Profilometer, Field Emission
Scanning Electron Microscopy (FESEM) and ultraviolet–visible. By increasing O2, the crystallite
size increases from 20 to 27 nm, which leads to an enlargement in the ZnO band gap from
3.18 to 3.30 eV. At 30 sccm of O2, the films present a significant improvement in the band
gap (3.30 eV). The results reveal that with increasing O2, all films show a high crystallinity in
the wurtzite phase and present a (002)ZnO preferential orientation along the c-axis. ZnO
exhibited a good self-texture